INDUSTRY SOLUTIONS

High-purity nitrogen and oxygen systems for semiconductor manufacturing

Semiconductor, display and electronics manufacturing need nitrogen at 4N to 6N purity, delivered continuously and measured in ppm and ppb. We supply cryogenic nitrogen plants, on-site gas systems and high-purity oxygen for wafer cleaning, carrier gas, furnace atmosphere, purging, CVD/PVD processes and electronic specialty gas production.

4N – 6N

Typical N₂ purity requirement

ppm / ppb

Residual O₂, H₂O and THC limits

≥8,000 h/y

Continuous duty, redundancy designed in

Liquid backup

LIN storage keeps the fab running

WHAT THIS INDUSTRY NEEDS

What this industry actually needs

Purity defined as impurity limits, not just a percentage

At 99.9999% the specification reads as oxygen, moisture, CO and total hydrocarbon limits in ppb — each of which drives plant design and analyser selection.

Continuity above price per Nm³

An interruption in nitrogen supply stops a fab line, so availability, redundant purification and liquid backup are evaluated before specific power.

Load following

Gas demand tracks production shifts and tool loading, so the plant must hold purity across a wide turn-down range, not only at design point.

Clean, documented delivery

Material certificates, welding records, passivation and internal cleanliness all fall within the buyer's quality audit.

Oxygen for oxidation processes

High-purity oxygen at 99.999% is required for oxidation, ozone generation and some specialty gas processes.

TYPICAL REQUIREMENTS

Typical process requirements

Nitrogen purity

Additional purification stage, tighter column control

99.999% – 99.9999% (4N – 6N)

Residual oxygen

Analyser selection and sample conditioning

ppm to sub-ppm

Moisture / dew point

Molecular sieve cycle control, leak-tight construction

ppb to low ppm

Flow

Turn-down range, buffer storage, load control

Hundreds to several thousand Nm³/h

Discharge pressure

Internal or external compression

0.5 – 2.0 MPa(G) typical

Backup

LIN column, cryogenic tank and pump

Liquid nitrogen storage and vaporiser

Operating hours

Reliability-centred equipment selection

≥8,000 h/y, essentially continuous

Quality documentation

Workshop QC and traceability

Material and test certificates, weld records

RECOMMENDED CONFIGURATION

Recommended configuration

How we would configure the plant for this duty.

Cryogenic nitrogen plant

For flows from about 1,000 Nm³/h upward and 5N or better, a cryogenic plant is normally the lower cost of ownership: separation cost per Nm³ stays flat as purity increases, unlike PSA.

Purification and trace analysis

Additional adsorption stage where 6N or better is required, with continuous trace oxygen and moisture analysers and validated calibration.

Liquid nitrogen backup

LIN column, cryogenic storage and vaporiser sized to the critical load, so a plant stop or power interruption does not stop the line.

Oxygen supply

High-purity oxygen up to 99.999% from the oxygen column of the same cold box or from liquid oxygen storage, with oil-free design throughout.

Redundancy and control

Spared rotating equipment, redundant purification and DCS control with independent safety interlocks for uninterrupted supply.

Modular shipment

Workshop assembly and function testing of cold box and skids to shorten the construction programme.

QUESTIONS ENGINEERS ASK US

Questions engineers ask us

Why is a cryogenic plant preferred above 5N purity?

Because the cost per Nm³ stays almost flat as purity increases, whereas PSA needs large beds and high power to reach the same purity — and purity stability is easier to hold at high flow.

How is purity verified?

With on-line trace analysers for oxygen, moisture and hydrocarbons, sample conditioning units and a documented calibration procedure, verified at the performance test.

What happens if the plant stops?

Liquid nitrogen storage with automatic vaporisation keeps the fab supplied while the plant restarts; storage size follows the agreed acceptable interruption time.

Can you supply oxygen and nitrogen from one plant?

Yes. A combined cold box produces both products, and argon where the site justifies recovery, sharing compression and refrigeration.

START WITH YOUR PROCESS

Send us your impurity specification.

Nitrogen and oxygen flow, impurity limits in ppm or ppb, discharge pressure, backup requirement and site conditions are enough for a preliminary configuration.